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3D Ion Milling With ± 1nm Z-Direction Accuracy

A new ion milling technique has been developed to produce complex 3-dimensional patterns on the nanometer length scale. This is achieved through the accurate control of milling depth to within 1nm. Conventional ion milling techniques produce pseudo 3D structures - stacks of flat-bottomed volumes, which limits their application. Other techniques...

Published: 8/13/2012 | Updated: 3/31/2011 | Inventor(s): David Cox

Keywords(s): Nanolitography

Category(s): Nanotechnology